Solder Paste for MEMS Package: Atomic Layer Deposition Process Assists PowderMEMS
According to Memes Consulting, the Fraunhofer Institute for Silicon Technology (ISIT) in Germany announced the use of the PICOSUN P-300B ALD system for its PowderMEMS technology platform. PICOSUN P-300B ALD and its features PowderMEMS from Fraunhofer ISIT is a new innovative technology for creating three-dimensional microstructures from a variety of materials at the wafer level. The technology is based on bonding micron-sized powder particles together in cavities through an atomic layer deposition (ALD) process. PowderMEMS has many advantages over other fabrication techniques because it allows the use of much lower process temperatures than traditional sintering processes. The bonded porous structure is thermally and chemically resistant, allowing extensive post-processing in cleanrooms. PowderMEMS technical specifications "PowderMEMS can be used in a variety of MEMS applications, including sensors, actuators, energy harvesters, microfluidics, microelectronics, etc....